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Sublimation/Entrainer

Sublimation-Entrainers provide delivery sources for high-vapor pressure solids utilized in ALD and CVD applications. The reservoir portion can be filled to level with solids. The domed head has a directed inlet for carrier gas and a side exit for delivery. The reservoir can be heated to moderate temperatures (150°C) to increase vapor pressure of solids and allow entrainment by carrier gases. An extra port is provided for evacuation or thermocouple access. Sublimation-entrainers are fabricated from 316L stainless steel and equipped with high vacuum fittings. Valve connections are SS-4-VCR-3. Auxilliary port is SS-8-VCR-1-8.

Product Code Capacity Nominal Tare
zSUE-S-0275 275ml 2.80 kg
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