Medical Devices

Micro-Electro-Mechanical Structures (MEMS)

MEMS are micro-electro-mechanical structures produced by methodologies generally consistent with scales and techniques associated with monolithic integrated circuit (microchip) fabrication. The integration of mechanical sensors and actuators involves a broader range of material technologies and concerns than in integrated circuit technology.


Chemical Vapor Deposition (CVD)

Silicon dioxide thin films - CVD precursors

UV Conversion Coatings

These materials develop directly to SiO2 on exposure to deep UV

Anti-stiction Coatings


Self-Assembled Monolayers


Selected Products

Silicon Dioxide Thin Films - CVD Precursors

Anti-stiction Coatings (Siloxanes)

Anti-stiction Coatings (Fluorosilanes)