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METHYLSILANE
EINECS Number: 213-598-5
Alternative Name: 1MS
Specific Gravity: 0.628
HMIS Key: 3-4-3-X
Hydrolytic Sensitivity: 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required
Formula: CH6Si
TSCA: TSCA
Additional Properties: 130Dipole moment: 0.73 debye?Hcomb: -624 kcal/mole79.3°?Hform: -7 kcal/mole?Hvap: 4.6 kcal/moleVapor pressure, 21°: 14 atm (210 psia)
Silanes
Gases
Understanding ALD MLD and SAMs as they enter the fab – Arkles, Goff, & Kaloyeros