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Product Code: SIB1069.0

Cas No: 27804-64-4

10 g

Alternative Name: BDEAS

Specific Gravity: 0.804

HMIS Key: 4-2-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: C8H22N2Si

Application: ALD precursor for HfSiOx dielectric films.1

Reference: 1. Katamreddy, R. et al. J. Electrochem. Soc. 2008, 155, G163.