27804-64-4

All structures are computer generated. Please rely on the product data below for placing your order. If you see any errors in structures, please email customer service so that they can be addressed.

BIS(DIETHYLAMINO)SILANE

Product Code: SIB1069.0

Cas No: 27804-64-4

R&D quantities:

10 g
$125.00

Interested in a Commercial Order?

Boiling Point: 70° / 30

Molecular Weight: 174.16

Alternative Name: BDEAS

Specific Gravity: 0.804

HMIS Key: 4-2-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: C8H22N2Si

Application: ALD precursor for HfSiOx dielectric films.1

Reference: 1. Katamreddy, R. et al. J. Electrochem. Soc. 2008, 155, G163.