992-94-9

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METHYLSILANE

Product Code: SIM6515.0

Cas No: 992-94-9

R&D quantities:

50 g
$743.00
Volatile Carbosilane

Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

Methylsilane; 1MS; Silylmethane; Monomethylsilane; Monosilylmethane
  • CAUTION: CAN FORM EXPLOSIVE MIXTURES WITH AIR

  • ΔHcomb: -2,612 kJ/mol
  • ΔHform: -29 kJ/mol
  • ΔHvap: 19.3 kJ/mol
  • Dipole moment: 0.73 debye
  • Vapor pressure, -80 °C: 241 mm
  • Vapor pressure, 21 °C: 14 atm (210 psia)
  • Critical temperature: 79.3 °C
  • Plasma polymerization yields dry process photoresist
  • Intermediate for poly(methylsilane) precursor to silicon carbide
  • Deposits SiC on Si and Ge at 400 - 500 °C
  • Source for hydrogenated amorphous silicon carbide films
  • Boiling Point: -57°

    EINECS Number: 213-598-5

    Melting Point: -157°

    Molecular Weight: 46.14

    Alternative Name: 1MS

    Specific Gravity: 0.628

    HMIS Key: 3-4-3-X

    Hydrolytic Sensitivity: 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required

    Formula: CH6Si

    TSCA: TSCA

    Application: Plasma polymerization yields dry process photoresist.1
    Intermediate for poly(methylsilane) precursor to silicon carbide.2
    Deposits SiC on Si and Ge at 400 - 500?C.3
    Source for hydrogenated amorphous silicon carbide films.4

    Reference: 1. Dabbagh, G. et al. J. Photopolym. Sci. Tech. 1998, 11, 651.
    2. Fhang, Z. et al. J. Am. Ceram. Soc. 1991, 74, 670.
    3. Takatsuka, T. et al. Appl. Surf. Sci. 2000, 162, 156.
    4. Lee, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 153.

    Additional Properties: 130
    Dipole moment: 0.73 debye
    ?Hcomb: -624 kcal/mole
    Critical temperature: 79.3°
    ?Hform: -7 kcal/mole
    ?Hvap: 4.6 kcal/mole
    Vapor pressure, -80°: 241 mm
    Vapor pressure, 21°: 14 atm (210 psia)