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Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
Specific Gravity: 0.806
Flashpoint: 35°C (95°F)
HMIS Key: 3-3-2-X
Hydrolytic Sensitivity: 7: reacts slowly with moisture/water
Refractive Index: 1.4669
Additional Properties: Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers