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Boiling Point: 61-2° / 30
Molecular Weight: 164.48
Specific Gravity: 0.806
Flashpoint: 35°C (95°F)
HMIS Key: 3-3-2-X
Hydrolytic Sensitivity: 7: reacts slowly with moisture/water
Refractive Index: 1.4669
Additional Properties: Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers