Pack Size
Quantity
Price
 
25 g
$1,132.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Synonyms

    BIS(SILYLMETHYL)SILANE
  • HMIS

    3-4-2-X
  • Molecular Formula

    C2H12Si3
  • Molecular Weight (g/mol)

    120.37
  • Purity (%)

    98%
  • TSCA

    Yes (L)
    Low Volume Exemption
  • Boiling Point (˚C/mmHg)

    100
  • Density (g/mL)

    0.7628
  • Flash Point (˚C)

    -16 °C
  • Refractive Index @ 20˚C

    1.4491

Additional Properties

  • Hydrolytic Sensitivity

    7: reacts slowly with moisture/water
  • Application

    Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers.1

    Reference

    1. Weidman, T. et al. US Patent Appl. 2012/0122302 A1, 2012.

    Safety

  • Packaging Under

    Nitrogen
  • Volatile Carbosilane

    Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

    1,3,5-Trisilapentane; Bis(silylmethyl)silane; Trisilmethylene

  • Employed in ALD of SiC films
  • Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers
  • Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics

    Silicon Chemistry, Applied Technology

    Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics