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Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilapentane; Bis(silylmethyl)silane; Trisilmethylene
Boiling Point: 100°
Molecular Weight: 120.37
Alternative Name: BIS(SILYLMETHYL)SILANE
Specific Gravity: 0.7628
Flashpoint: -16°C (3°F)
HMIS Key: 3-4-2-X
Hydrolytic Sensitivity: 7: reacts slowly with moisture/water
Refractive Index: 1.4491
Application: Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers.1
Reference: 1. Weidman, T. et al. US Patent Appl. 2012/0122302 A1, 2012.
Additional Properties: Employed in ALD of SiC films