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Product Code: SIT8709.8

Cas No: 5637-99-0

R&D quantities:

25 g
Volatile Carbosilane

Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

1,3,5-Trisilapentane; Bis(silylmethyl)silane; Trisilmethylene
  • Employed in ALD of SiC films
  • Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers
  • Boiling Point: 100°

    Molecular Weight: 120.37

    Alternative Name: BIS(SILYLMETHYL)SILANE

    Specific Gravity: 0.7628

    Flashpoint: -16°C (3°F)

    HMIS Key: 3-4-2-X

    Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

    Formula: C2H12Si3

    Refractive Index: 1.4491


    Application: Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers.1

    Reference: 1. Weidman, T. et al. US Patent Appl. 2012/0122302 A1, 2012.

    Additional Properties: Employed in ALD of SiC films