All structures are computer generated. Please rely on the product data below for placing your order. If you see any errors in structures, please email customer service so that they can be addressed.


Product Code: SIT8709.3

Cas No: 291-27-0

25 g
Volatile Carbosilane

Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane
  • Single source precursor for β-SiC by LPCVD at 800-1,000 °C

    Specific Gravity: 0.9001

    HMIS Key: 3-4-1-X

    Hydrolytic Sensitivity: 3: reacts with aqueous base

    Formula: C3H12Si3

    Refractive Index: 1.5059

    Application: Single source precursor for beta-SiC by LPCVD at 800-1,000°.1

    Reference: 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.