Additional Properties
- Synonyms CYCLOTRISILMETHYLENE
- HMIS 3-4-1-X
- Molecular Formula C3H12Si3
- Molecular Weight (g/mol) 132.38
- Purity (%) 97%
- TSCA Yes (L)Low Volume Exemption
- Boiling Point (˚C/mmHg) 135
- Density (g/mL) 0.9001
- Flash Point (˚C) 11 °C
- Melting Point (˚C) -10°
- Refractive Index @ 20˚C 1.5059
Application
Single source precursor for beta-SiC by LPCVD at 800-1,000°.1
Reference
1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.
Safety
Volatile Carbosilane
Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane
Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics
Silicon Chemistry, Applied Technology
Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics