1,3,5-TRISILACYCLOHEXANE

Product Code: SIT8709.3
CAS No: 291-27-0
SDS Sheets: EU | US
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291-27-0
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Quantity
Price
 
25 g
$1,416.00

Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Synonyms

    CYCLOTRISILMETHYLENE
  • HMIS

    3-4-1-X
  • Molecular Formula

    C3H12Si3
  • Molecular Weight (g/mol)

    132.38
  • Purity (%)

    97%
  • TSCA

    Yes (L)
    Low Volume Exemption
  • Boiling Point (˚C/mmHg)

    135
  • Density (g/mL)

    0.9001
  • Flash Point (˚C)

    11 °C
  • Melting Point (˚C)

    -10°
  • Refractive Index @ 20˚C

    1.5059

Additional Properties

  • Hydrolytic Sensitivity

    3: reacts with aqueous base

    • Application

    Single source precursor for beta-SiC by LPCVD at 800-1,000°.1

    Reference

    1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.

    Safety

  • Packaging Under

    Nitrogen

    • Volatile Carbosilane

    Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

    1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane

  • Single source precursor for β-SiC by LPCVD at 800-1,000 °C

    • Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics

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    Silicon Chemistry, Applied Technology

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    Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics

    Synthesizing Low-k CVD Materials for Fab Use – Arkles et al.