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Boiling Point: 135°
Melting Point: -10°
Molecular Weight: 132.38
Alternative Name: CYCLOTRISILMETHYLENE
Specific Gravity: 0.9001
HMIS Key: 3-4-1-X
Hydrolytic Sensitivity: 3: reacts with aqueous base
Refractive Index: 1.5059
Application: Single source precursor for beta-SiC by LPCVD at 800-1,000°.1
Reference: 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.