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Product Code: SIT8709.3

Cas No: 291-27-0

R&D quantities:

25 g

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Volatile Carbosilane

Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane
  • Single source precursor for β-SiC by LPCVD at 800-1,000 °C
  • Boiling Point: 135°

    Melting Point: -10°

    Molecular Weight: 132.38


    Specific Gravity: 0.9001

    HMIS Key: 3-4-1-X

    Hydrolytic Sensitivity: 3: reacts with aqueous base

    Formula: C3H12Si3

    Refractive Index: 1.5059

    Application: Single source precursor for beta-SiC by LPCVD at 800-1,000°.1

    Reference: 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.