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Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane
Boiling Point: 135°
Melting Point: -10°
Molecular Weight: 132.38
Alternative Name: CYCLOTRISILMETHYLENE
Specific Gravity: 0.9001
HMIS Key: 3-4-1-X
Hydrolytic Sensitivity: 3: reacts with aqueous base
Refractive Index: 1.5059
Application: Single source precursor for beta-SiC by LPCVD at 800-1,000°.1
Reference: 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.