1,3,5-TRISILACYCLOHEXANE

Product Code: SIT8709.3
CAS No: 291-27-0
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
25 g
$694.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Synonyms

    CYCLOTRISILMETHYLENE
  • HMIS

    3-4-1-X
  • Molecular Formula

    C3H12Si3
  • Molecular Weight (g/mol)

    132.38
  • Purity (%)

    97%
  • TSCA

    Yes (L)
    Low Volume Exemption
  • Boiling Point (˚C/mmHg)

    135
  • Density (g/mL)

    0.9001
  • Melting Point (˚C)

    -10°
  • Refractive Index @ 20˚C

    1.5059

Additional Properties

  • Hydrolytic Sensitivity

    3: reacts with aqueous base
  • Application

    Single source precursor for beta-SiC by LPCVD at 800-1,000°.1

    Reference

    1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.

    Safety

  • Packaging Under

    Nitrogen
  • Volatile Carbosilane

    Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

    1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane

  • Single source precursor for β-SiC by LPCVD at 800-1,000 °C
  • Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics

    Silicon Chemistry, Applied Technology

    Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics