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Product Code: SIT8709.3

Cas No: 291-27-0

R&D quantities:

25 g

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Boiling Point: 135°

Melting Point: -10°

Molecular Weight: 132.38


Specific Gravity: 0.9001

HMIS Key: 3-4-1-X

Hydrolytic Sensitivity: 3: reacts with aqueous base

Formula: C3H12Si3

Refractive Index: 1.5059

Application: Single source precursor for beta-SiC by LPCVD at 800-1,000°.1

Reference: 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.