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Product Code: SIT8572.0

Cas No: 13257-81-3

R&D quantities:

25 g

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Boiling Point: 63° / 3

EINECS Number: 236-252-5

Molecular Weight: 172.30

Alternative Name: 4-(TRIMETHYLSILOXY)-3-PENTEN-2-ONE

Specific Gravity: 0.912

Flashpoint: 58°C (136°F)

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C8H16O2Si

Refractive Index: 1.4530


Application: Adhesion promoter for photoresists on silicon nitride and titanium nitride.1

Reference: 1. Endo, M. et al. Micro- and Nanopattering Polymers ACS Symposium; 1998, 706, 337.