TETRAMETHYLSILANE, 99.9+%

Product Code: SIT7555.1
CAS No: 75-76-3
SDS Sheets: EU | US
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75-76-3
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Pack Size
Quantity
Price
 
2 kg
$3,322.00

Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    200-899-1
  • Synonyms

    TMS; 4MS
  • HMIS

    1-4-0-X
  • Molecular Formula

    C4H12Si
  • Molecular Weight (g/mol)

    88.22
  • Purity (%)

    99.90%
  • TSCA

    Yes
  • Delta H Vaporization (kJ/mol)

    6.4 kcal/mole
  • Boiling Point (˚C/mmHg)

    26.6-26.7
  • Density (g/mL)

    0.641
  • Flash Point (˚C)

    -27 °C
  • Melting Point (˚C)

    -99°
  • Refractive Index @ 20˚C

    1.3588
  • Viscosity at 25 ˚C (cSt)

    0.4

Additional Properties

  • Hydrolytic Sensitivity

    1: no significant reaction with aqueous systems

    • Application

    Employed in deposition of SI:C:O:H dielectric films.1

    Reference

    1. Laxman, R. et al. Semiconductor International 2000, 23, 95.

    Safety

  • Hazard Info

    ihl rat, LC50: >5,000 ppm/4H
  • Packaging Under

    Nitrogen