TETRAMETHYLSILANE, 99.9+%

Product Code: SIT7555.1
CAS No: 75-76-3
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
25 g
$798.00
2 kg
$2,406.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    200-899-1
  • Synonyms

    TMS; 4MS
  • HMIS

    1-4-0-X
  • Molecular Formula

    C4H12Si
  • Molecular Weight (g/mol)

    88.22
  • Purity (%)

    99%
  • TSCA

    Yes
  • Delta H Vaporization (kJ/mol)

    6.4 kcal/mole
  • Boiling Point (˚C/mmHg)

    26.6-26.7
  • Density (g/mL)

    0.641
  • Flash Point (˚C)

    -27°C (-17°F)
  • Melting Point (˚C)

    -99°
  • Refractive Index @ 20˚C

    1.3588
  • Viscosity at 25 ˚C (cSt)

    0.4

Additional Properties

  • Hydrolytic Sensitivity

    1: no significant reaction with aqueous systems
  • Application

    Employed in deposition of SI:C:O:H dielectric films.1

    Reference

    1. Laxman, R. et al. Semiconductor International 2000, 23, 95.

    Safety

  • Hazard Info

    ihl rat, LC50: >5,000 ppm/4H
  • Packaging Under

    Nitrogen