75-76-3

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TETRAMETHYLSILANE, 99.9+%

Product Code: SIT7555.1

Cas No: 75-76-3

2 kg
$2,406.00
25 g
$798.00

EINECS Number: 200-899-1

Alternative Name: TMS; 4MS

Specific Gravity: 0.641

Flashpoint: -27°C (-17°F)

HMIS Key: 1-4-0-X

Hydrolytic Sensitivity: 1: no significant reaction with aqueous systems

Formula: C4H12Si

Purity: 99%

TSCA: TSCA

Refractive Index: 1.3588

Application: Employed in deposition of SI:C:O:H dielectric films.1

Reference: 1. Laxman, R. et al. Semiconductor International 2000, 23, 95.

Additional Properties: Photoionization threshold: 8.1 eV
Ce: 1.838 x 10-3
?Hcomb: 920 kcal/mole
185°
?Hform: -55.4 kcal/mole
33 atm
?Hvap: 6.4 kcal/mole
?Hfus: 1.6 kcal/mole
NMR grade