75-76-3

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TETRAMETHYLSILANE, 99.9+%

Product Code: SIT7555.1

Cas No: 75-76-3

R&D quantities:

25gm
$798.00
2kg
$2,406.00

Boiling Point: 26.6-26.7

EINECS Number: 200-899-1

Melting Point: -99°

Molecular Weight: 88.22

Alternative Name: TMS; 4MS

Specific Gravity: 0.641

Flashpoint: -27°C (-17°F)

HMIS Key: 1-4-0-X

Hydrolytic Sensitivity: 1: no significant reaction with aqueous systems

Formula: C4H12Si

Purity: 99%

Refractive Index: 1.3588

TSCA: TSCA

Application: Employed in deposition of SI:C:O:H dielectric films.1

Reference: 1. Laxman, R. et al. Semiconductor International 2000, 23, 95.

Additional Properties: 450
Photoionization threshold: 8.1 eV
Ce: 1.838 x 10-3
?Hcomb: 920 kcal/mole
Critical temperature: 185°
?Hform: -55.4 kcal/mole
Critical pressure: 33 atm
?Hvap: 6.4 kcal/mole
Heat capacity: 195.2 joules/mole-K
?Hfus: 1.6 kcal/mole
Dielectric constant: 1.92
NMR grade
Vapor pressure, 20°: 589 mm