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Tetramethylsilane; 4MS; TMS
EINECS Number: 200-899-1
Alternative Name: TMS; 4MS
Hydrolytic Sensitivity: 1: no significant reaction with aqueous systems
Refractive Index: 1.3588
Application: Intermediate for ?-SiC:H thin films by PECVD.1
Reference: 1. Kim, D. et al. Thin Solid Films 1996, 283, 109.
Additional Properties: Photoionization threshold: 8.1 eV?Hcomb: 920 kcal/mole?Hform: -55.4 kcal/mole?Hvap: 6.4 kcal/moleHeat capacity: 195.2 joules/mole-K?Hfus: 1.6 kcal/moleNMR grade