COMMERCIAL
75-76-3
Pack Size
Quantity
Price
 
25 g
$27.00
100 g
$94.00
2.5 kg
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10 kg
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Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    200-899-1
  • Synonyms

    TMS; 4MS
  • HMIS

    1-4-0-X
  • Molecular Formula

    C4H12Si
  • Molecular Weight (g/mol)

    88.22
  • Purity (%)

    99%
  • TSCA

    Yes
  • Delta H Vaporization (kJ/mol)

    6.4 kcal/mole
  • Autoignition Temp (˚C)

    450
  • Boiling Point (˚C/mmHg)

    26.6-26.7
  • Density (g/mL)

    0.641
  • Flash Point (˚C)

    -27
  • Melting Point (˚C)

    -99°
  • Refractive Index @ 20˚C

    1.3588
  • Viscosity at 25 ˚C (cSt)

    0.4

Additional Properties

  • Hydrolytic Sensitivity

    1: no significant reaction with aqueous systems
  • Application

    Intermediate for ?-SiC:H thin films by PECVD.1

    Reference

    1. Kim, D. et al. Thin Solid Films 1996, 283, 109.

    Safety

  • Hazard Info

    ihl rat, LC50: >5,000 ppm/4H
  • Packaging Under

    Nitrogen
  • Tetramethylsilane; 4MS; TMS

  • NMR grade
  • Viscosity: 0.4 cSt
  • ?Hcomb: 3,851 kJ/mol
  • ?Hform: -232 kJ/mol
  • ?Hvap: 26.8 kJ/mol
  • ?Hfus: 6.7 kJ/mol
  • Photoionization threshold: 8.1 eV
  • Ce: 1.838 x 10-3
  • Vapor pressure, 20 °C: 589 mm
  • Critical temperature: 185 °C
  • Critical pressure: 33 atm
  • Heat capacity: 195.2 Jmol-1K-1
  • Dielectric constant: 1.92
  • Intermediate for ?-SiC:H thin films by PECVD