COMMERCIAL
1009-93-4

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1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE

Product Code: SIH6102.0

Cas No: 1009-93-4

R&D quantities:

100 g
$116.00
25 g
$37.00
2 kg
$740.00

Interested in a Commercial Order?

Boiling Point: 186-8°

EINECS Number: 213-773-6

Melting Point: -10°

Molecular Weight: 219.51

Specific Gravity: 0.922

Flashpoint: 61°C (142°F)

HMIS Key: 2-2-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C6H21N3Si3

Refractive Index: 1.4448

TSCA: TSCA

Application: Modifies positive resists for O2 plasma resistance.1
Polymerizes to polydimethylsilazane oligomer in presence of Ru/H2.2
Silylation reagent for diols.3

Reference: 1. Babich, E. et al. Microelectron. Eng. 1990, 11, 503.
2. Blum, Y. et al. U.S. Patent 4,216,383, 1986; U.S. Patent 4,788,309, 1988.
3. Birkofer, L. et al. J. Organomet. Chem. 1980, 187, 21.

Additional Properties: Dipole moment: 0.92 debye
Dielectric constant, 1000Hz: 2.57
?Hform: 132 kcal/mole
Viscosity, 20°: 1.7 cSt