2587-46-4

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1,2,3,4,5,6 HEXAMETHYLCYCLOTRISILAZANE, tech-95

Product Code: SIH6103.0

Cas No: 2587-46-4

R&D quantities:

25 g
$248.00
5 g
$63.00

Interested in a Commercial Order?

Boiling Point: 56° / 5

Molecular Weight: 219.51

Specific Gravity: 0.929

HMIS Key: 2-2-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C6H21N3Si3

Purity: 95%

Refractive Index: 1.4580

Application: Pyrolytic deposition in ammonia yields silicon nitride.1

Reference: 1. Arkles, B. J. Electrochem. Soc. 1986, 133, 233.

Additional Properties: Contains tetramer