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1,2,3,4,5,6 HEXAMETHYLCYCLOTRISILAZANE, tech-95
Boiling Point: 56° / 5
Molecular Weight: 219.51
Specific Gravity: 0.929
HMIS Key: 2-2-1-X
Hydrolytic Sensitivity: 7: reacts slowly with moisture/water
Refractive Index: 1.4580
Application: Pyrolytic deposition in ammonia yields silicon nitride.1
Reference: 1. Arkles, B. J. Electrochem. Soc. 1986, 133, 233.
Additional Properties: Contains tetramer