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COPPER(I)/(II) HEXAFLUORO-2,4-PENTANEDIONATE – VINYLTRIMETHYLSILANE COMPLEX
Boiling Point: 50° / 50
Melting Point: -5°
Molecular Weight: 370.84
Specific Gravity: 1.49
Flashpoint: 72°C (162°F)
HMIS Key: 3-2-1-X
Hydrolytic Sensitivity: 7: reacts slowly with moisture/water
Purity: 10-20% Copper (II)
Application: High deposition rate, stable, optimized precursor for copper.1,2,3
Reference: 1. Kaloyeros, A. et al. U.S. Patent 6,037,001, 2000.
2. Burke, A. et al. J. Appl. Phys. 1997, 82, 4651.
3. Braeckelmann, G. et al. J. Vac. Sci. Technol. B 1996, 14, 1828.
Additional Properties: 34010 - 20% Copper(ll)