All structures are computer generated. Please rely on the product data below for placing your order. If you see any errors in structures, please email customer service so that they can be addressed.


Product Code: SIT8736.0

Cas No: 5505-72-6

100 g
25 g

EINECS Number: 226-848-3

Specific Gravity: 0.939

Flashpoint: 85°C (185°F)

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C9H21N3Si3

Purity: 95%

Refractive Index: 1.4802

Application: Precursor of vinylsilazane preceramic polymers.1
Reacts with photoresists to give RIE resistance.2
Intermediate for polyborosilazanes.3

Reference: 1. Toreki, W. et al. Ceram. Eng. Sci. Proc. 1990, 11, 1371.
2. Babich, E. et al. Microelectron. Eng. 1990, 11, 503.
3. Nghiem, Q.-D.; Kim, D.-P. J. Mater. Chem. 2005, 15, 2188.


Additional Properties: Contains cyclic tetrasilazane analog