1,3,5-TRIVINYL-1,3,5-TRIMETHYLCYCLOTRISILAZANE, 92%

Product Code: SIT8736.0
CAS No: 5505-72-6
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
25 g
$39.00
100 g
$126.00
2 kg
Contact Us For Pricing

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    226-848-3
  • HMIS

    3-2-1-X
  • Molecular Formula

    C9H21N3Si3
  • Molecular Weight (g/mol)

    255.54
  • Purity (%)

    95%
  • Boiling Point (˚C/mmHg)

    106-9° / 11
  • Density (g/mL)

    0.939
  • Flash Point (˚C)

    85°C (185°F)
  • Refractive Index @ 20˚C

    1.4802

Additional Properties

  • Hydrolytic Sensitivity

    7: reacts slowly with moisture/water
  • Application

    Precursor of vinylsilazane preceramic polymers.1
    Reacts with photoresists to give RIE resistance.2
    Intermediate for polyborosilazanes.3

    Reference

    1. Toreki, W. et al. Ceram. Eng. Sci. Proc. 1990, 11, 1371.
    2. Babich, E. et al. Microelectron. Eng. 1990, 11, 503.
    3. Nghiem, Q.-D.; Kim, D.-P. J. Mater. Chem. 2005, 15, 2188.

    Safety

  • Packaging Under

    Nitrogen