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Product Code: SIH5840.58

Cas No: 186599-47-3

10 g

Specific Gravity: 1.290

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C15H19F17N2Si

Application: Forms conformal hydrophobic films on Al2O3 by ALD.1

Reference: 1. Herrmann, C. et al. J. Micromech. Microeng. 2005, 15, 1.