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- HMIS 3-2-1-X
- Molecular Formula C15H19F17N2Si
- Molecular Weight (g/mol) 578.38
- Boiling Point (˚C/mmHg) 73-5° / 0.1
- Density (g/mL) 1.290
Forms conformal hydrophobic films on Al2O3 by ALD.1
1. Herrmann, C. et al. J. Micromech. Microeng. 2005, 15, 1.