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Boiling Point: 69-70°
Molecular Weight: 100.24
Specific Gravity: 0.705
Flashpoint: -20°C (-4°F)
HMIS Key: 2-4-2-X
Hydrolytic Sensitivity: 3: reacts with aqueous base
Refractive Index: 1.4029
Application: Dry-development resist produced by plasma polymerization.1
Reference: 1. Fujitsu, Chem. Abstr.101, 31148n; Jap. Patent 59013323, 1984.