ZIRCONIUM BIS(HEXAMETHYLDISILAZIDE)DICHLORIDE, tech-95

Product Code: SIZ9810.0
CAS No: 70969-28-7
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
10 g
$147.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • HMIS

    3-2-1-X
  • Molecular Formula

    C12H36Cl2N2Si4Zr
  • Molecular Weight (g/mol)

    482.90
  • Melting Point (˚C)

    50°

Additional Properties

  • Hydrolytic Sensitivity

    8: reacts rapidly with moisture, water, protic solvents
  • Application

    Precursor for ALD of ZrO2.1

    Reference

    1. Nam, W. et al. Chem. Vap. Deposition 2004, 10, 201.

    Safety

  • Packaging Under

    Nitrogen