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- HMIS 3-2-1-X
- Molecular Formula C12H36Cl2N2Si4Zr
- Molecular Weight (g/mol) 482.90
- TSCA No
- Boiling Point (˚C/mmHg) NA
- Melting Point (˚C) 50°
Precursor for ALD of ZrO2.1
1. Nam, W. et al. Chem. Vap. Deposition 2004, 10, 201.