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YTTRIUM(III) TRIS(HEXAMETHYLDISILAZIDE)
Alternative Name: YTTRIUM(III) TRIS[BIS(TRIMETHYLSILYLAMIDE)]
HMIS Key: 3-2-1-X
Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
Formula: C18H54N3Si6Y
Additional Properties: Employed in CVD of yttria stabilized coatings
Silanes
Silanes