1,3,5-TRISILAPENTANE

Product Code: SIT8709.8
CAS No: 5637-99-0
SDS Sheets: EU | US
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Quantity
Price
 
25 g
$1,302.00

Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Synonyms

    BIS(SILYLMETHYL)SILANE
  • HMIS

    3-4-2-X
  • Molecular Formula

    C2H12Si3
  • Molecular Weight (g/mol)

    120.37
  • Purity (%)

    98%
  • TSCA

    Yes (L)
    Low Volume Exemption
  • Boiling Point (˚C/mmHg)

    100
  • Density (g/mL)

    0.7628
  • Flash Point (˚C)

    -16 °C
  • Refractive Index @ 20˚C

    1.4491

Additional Properties

  • Hydrolytic Sensitivity

    7: reacts slowly with moisture/water

    • Application

    Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers.1

    Reference

    1. Weidman, T. et al. US Patent Appl. 2012/0122302 A1, 2012.

    Safety

  • Packaging Under

    Nitrogen

    • Volatile Carbosilane

    Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

    1,3,5-Trisilapentane; Bis(silylmethyl)silane; Trisilmethylene

  • Employed in ALD of SiC films
  • Employed in PECVD of silicon carbide and silicon carbonitride “seed” layers

    • Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics

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