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Product Code: SIT8180.0

Cas No: 358-60-1

R&D quantities:

50 g
10 g

Boiling Point: 133-134°

Molecular Weight: 182.27

Specific Gravity: 0.94

HMIS Key: 3-3-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: C6H15FO3Si

Purity: 95%


Application: Employed in CVD of silicon dioxide films with low dielectric constants.1,2,3

Reference: 1. Homma, T. et al. J. Electrochem. Soc. 1993, 140, 687.
2. Hayashi, T. et al. J. Ceram. Soc. Japan 1997, 105, 428.
3. Gorman, B. P. et al. Appl. Phys. Lett. 2001, 79, 4010.


Additional Properties: Vapor pressure, 25°: 3.3 mm