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TRIETHOXYFLUOROSILANE, 95%
Boiling Point: 133-134°
Molecular Weight: 182.27
Specific Gravity: 0.94
HMIS Key: 3-3-1-X
Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
Formula: C6H15FO3Si
Purity: 95%
TSCA: TSCA
Application: Employed in CVD of silicon dioxide films with low dielectric constants.1,2,3
Reference: 1. Homma, T. et al. J. Electrochem. Soc. 1993, 140, 687.
2. Hayashi, T. et al. J. Ceram. Soc. Japan 1997, 105, 428.
3. Gorman, B. P. et al. Appl. Phys. Lett. 2001, 79, 4010.
Fieser:
Additional Properties: Vapor pressure, 25°: 3.3 mm
Metal-Organics
Silanes