TRIETHOXYFLUOROSILANE, 92%

Product Code: SIT8180.0
CAS No: 358-60-1
SDS Sheets: EU | US
Pack Size
Quantity
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10 g
$65.00
50 g
$258.00
2 kg
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Product data and descriptions listed are typical values, not intended to be used as specification.

  • HMIS

    3-3-1-X
  • Molecular Formula

    C6H15FO3Si
  • Molecular Weight (g/mol)

    182.27
  • Purity (%)

    92%
  • TSCA

    Yes
  • Boiling Point (˚C/mmHg)

    133-134
  • Density (g/mL)

    0.94

Additional Properties

  • Hydrolytic Sensitivity

    8: reacts rapidly with moisture, water, protic solvents
  • Application

    Employed in CVD of silicon dioxide films with low dielectric constants.1,2,3

    Reference

    1. Homma, T. et al. J. Electrochem. Soc. 1993, 140, 687.
    2. Hayashi, T. et al. J. Ceram. Soc. Japan 1997, 105, 428.
    3. Gorman, B. P. et al. Appl. Phys. Lett. 2001, 79, 4010.

    Safety

  • Packaging Under

    Nitrogen