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Product Code: SIP6902.1

Cas No: 35789-00-5

5 g

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: C18H54N3PrSi6

Application: Precursor for 15-21 k dielectric films.1

Reference: 1. Kukli, K. et al. Chem Mater. 2004, 16, 5162.

Additional Properties: Light Green