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PRASEODYMIUM TRIS(HEXAMETHYLDISILAZIDE)
HMIS Key: 3-2-1-X
Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
Formula: C18H54N3PrSi6
Application: Precursor for 15-21 k dielectric films.1
Reference: 1. Kukli, K. et al. Chem Mater. 2004, 16, 5162.
Additional Properties: Light Green
Silanes