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Product Code: SIH5905.1

Cas No: 13465-77-5

25 g
3 kg
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Product data and descriptions listed are typical values, not intended to be used as specification.

EINECS Number: 236-704-1

Alternative Name: HCDS

Specific Gravity: 1.562

Flashpoint: 78°C (172°F)

HMIS Key: 3-3-2-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: Cl6Si2

Purity: 100%


Refractive Index: 1.4750

Application: In combination with NH3 generates SiN films.1

Reference: 1. Tanaka, M. et al. J. Electrochem. Soc. 2000, 147, 2284.

Additional Properties: Precursor for CVD of SiN films
Vapor pressure, 85°: 110 mm