13465-77-5

All structures are computer generated. Please rely on the product data below for placing your order. If you see any errors in structures, please email customer service so that they can be addressed.

HEXACHLORODISILANE, 99.9%

Product Code: SIH5905.1

Cas No: 13465-77-5

25 g
$523.00

EINECS Number: 236-704-1

Alternative Name: HCDS

Specific Gravity: 1.562

Flashpoint: 78°C (172°F)

HMIS Key: 3-3-2-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: Cl6Si2

Purity: 100%

TSCA: TSCA

Refractive Index: 1.4750

Application: In combination with NH3 generates SiN films.1

Reference: 1. Tanaka, M. et al. J. Electrochem. Soc. 2000, 147, 2284.

Additional Properties: Precursor for CVD of SiN films
Vapor pressure, 85°: 110 mm