13465-77-5

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HEXACHLORODISILANE, 99.9%

Product Code: SIH5905.1

Cas No: 13465-77-5

R&D quantities:

25 g
$523.00

Boiling Point: 144-6°

EINECS Number: 236-704-1

Melting Point: -1°

Molecular Weight: 268.89

Alternative Name: HCDS

Specific Gravity: 1.562

Flashpoint: 78°C (172°F)

HMIS Key: 3-3-2-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: Cl6Si2

Purity: 100%

Refractive Index: 1.4750

TSCA: TSCA

Application: In combination with NH3 generates SiN films.1

Reference: 1. Tanaka, M. et al. J. Electrochem. Soc. 2000, 147, 2284.

Additional Properties: Precursor for CVD of SiN films
Vapor pressure, 40°: 12 mm
Vapor pressure, 85°: 110 mm