Additional Properties
- Synonyms 1-METHYLDISILMETHYLENE
- HMIS 3-4-2-X
- Molecular Formula C2H10Si2
- Molecular Weight (g/mol) 90.27
- Purity (%) 97%
- TSCA No
- Boiling Point (˚C/mmHg) 44-5°
- Density (g/mL) 0.80
- Flash Point (˚C) -19 °C
- Refractive Index @ 20˚C 1.436
Application
Precursor for low temperature CVD of silicon carbide MEMS.1,2
Reference
1. Stoldt, C. et al. Sens.Actuators, A 2002, 97-8, 410.
2. Stoldt, C. et al. Appl. Phys. Lett. 2001, 347.
Safety
Volatile Carbosilane
Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
1,3-Disilabutane; 1-Methyldisilmethylene
Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics
Silicon Chemistry, Applied Technology
Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics