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Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
Boiling Point: 44-5°
Molecular Weight: 90.27
Alternative Name: 1-METHYLDISILMETHYLENE
Specific Gravity: 0.80
Flashpoint: -19°C (-2°F)
HMIS Key: 3-4-2-X
Hydrolytic Sensitivity: 3: reacts with aqueous base
Refractive Index: 1.436
Application: Precursor for low temperature CVD of silicon carbide MEMS.1,2
Reference: 1. Stoldt, C. et al. Sens.Actuators, A 2002, 97-8, 410.
2. Stoldt, C. et al. Appl. Phys. Lett. 2001, 347.