1,3-DISILABUTANE

Product Code: SID4592.0
CAS No: 6787-86-6
SDS Sheets: EU | US
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Quantity
Price
 
5 g
$317.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Synonyms

    1-METHYLDISILMETHYLENE
  • HMIS

    3-4-2-X
  • Molecular Formula

    C2H10Si2
  • Molecular Weight (g/mol)

    90.27
  • Purity (%)

    97%
  • TSCA

    No
  • Boiling Point (˚C/mmHg)

    44-5°
  • Density (g/mL)

    0.80
  • Flash Point (˚C)

    -19 °C
  • Refractive Index @ 20˚C

    1.436

Additional Properties

  • Hydrolytic Sensitivity

    3: reacts with aqueous base

    • Application

    Precursor for low temperature CVD of silicon carbide MEMS.1,2

    Reference

    1. Stoldt, C. et al. Sens.Actuators, A 2002, 97-8, 410.
    2. Stoldt, C. et al. Appl. Phys. Lett. 2001, 347.

    Safety

  • Packaging Under

    Nitrogen
  • Store Cold

    • Volatile Carbosilane

    Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

    1,3-Disilabutane; 1-Methyldisilmethylene

  • For CVD of silicon carbide
  • Precursor for low temperature CVD of silicon carbide MEMS

    • Silicon Chemistry, Applied Technology, Metal-Organic Chemistry, Applied Chemistry & Physics

    Low Temperature Inorganic CVD of Ti-Si-N Diffusion Barrier Liners for Gigascale Copper Interconnect Applications – Eisenbraun et al.

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    Synthesizing Low-k CVD Materials for Fab Use – Arkles et al.