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Boiling Point: 44-5°
Molecular Weight: 90.27
Alternative Name: 1-METHYLDISILMETHYLENE
Specific Gravity: 0.80
Flashpoint: -19°C (-2°F)
HMIS Key: 3-4-2-X
Hydrolytic Sensitivity: 3: reacts with aqueous base
Refractive Index: 1.436
Application: Precursor for low temperature CVD of silicon carbide MEMS.1,2
Reference: 1. Stoldt, C. et al. Sens.Actuators, A 2002, 97-8, 410.
2. Stoldt, C. et al. Appl. Phys. Lett. 2001, 347.