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Product Code: SID4592.0

Cas No: 6787-86-6

R&D quantities:

5 g

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Boiling Point: 44-5°

Molecular Weight: 90.27


Specific Gravity: 0.80

Flashpoint: -19°C (-2°F)

HMIS Key: 3-4-2-X

Hydrolytic Sensitivity: 3: reacts with aqueous base

Formula: C2H10Si2

Refractive Index: 1.436

Application: Precursor for low temperature CVD of silicon carbide MEMS.1,2

Reference: 1. Stoldt, C. et al. Sens.Actuators, A 2002, 97-8, 410.
2. Stoldt, C. et al. Appl. Phys. Lett. 2001, 347.