All structures are computer generated. Please rely on the product data below for placing your order. If you see any errors in structures, please email customer service so that they can be addressed.


Product Code: SID4592.0

Cas No: 6787-86-6

5 g
Volatile Carbosilane

Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.

1,3-Disilabutane; 1-Methyldisilmethylene
  • For CVD of silicon carbide
  • Precursor for low temperature CVD of silicon carbide MEMS
  • Alternative Name: 1-METHYLDISILMETHYLENE

    Specific Gravity: 0.80

    Flashpoint: -19°C (-2°F)

    HMIS Key: 3-4-2-X

    Hydrolytic Sensitivity: 3: reacts with aqueous base

    Formula: C2H10Si2

    Refractive Index: 1.436

    Application: Precursor for low temperature CVD of silicon carbide MEMS.1,2

    Reference: 1. Stoldt, C. et al. Sens.Actuators, A 2002, 97-8, 410.
    2. Stoldt, C. et al. Appl. Phys. Lett. 2001, 347.