DICHLOROSILANE, 99.9+%

Product Code: SID3368.1
CAS No: 4109-96-0
SDS Sheets: EU | US
COMMERCIAL
4109-96-0
Pack Size
Quantity
Price
 
250 g
$1,452.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    223-888-3
  • Synonyms

    DCS
  • HMIS

    4-4-3-X
  • Molecular Formula

    H2Cl2Si
  • Molecular Weight (g/mol)

    101.01
  • Purity (%)

    100%
  • TSCA

    Yes
  • Boiling Point (˚C/mmHg)

    8.3°
  • Density (g/mL)

    1.22
  • Density Temperature (˚C)

    7
  • Flash Point (˚C)

    -37 °C
  • Melting Point (˚C)

    -122°

Additional Properties

  • Hydrolytic Sensitivity

    9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required
  • Safety

  • Packaging Under

    Nitrogen
  • Silicon Chemistry, Applied Technology

    Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications – Kaloyeros, Jove, Goff, & Arkles

    This article provides an overview of the state-of-the-art chemistry and processing technologies for silicon nitride and silicon nitride- rich films, i.e., silicon nitride with C inclusion, both in hydrogenated (SiNx:H and SiNx:H(C)) and non-hydrogenated (SiNx and SiNx(C)) forms. The emphasis is on emerging trends and innovations in these SiNx material system technologies, with focus on Si and N source chemistries and thin film growth processes, including their primary effects on resulting film properties. It also illustrates that SiNx and its SiNx(C) derivative are the focus of an ever-growing research and manufacturing interest and that their potential usages are expanding into new technological areas.