CHLOROTRIS(TRIMETHYLSILYL)SILANE, 95%

Product Code: SIC2420.0
CAS No: 5565-32-2
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5565-32-2
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Pack Size
Quantity
Price
 
2.5 g
$183.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • HMIS

    3-3-1-X
  • Molecular Formula

    C9H27ClSi4
  • Molecular Weight (g/mol)

    283.11
  • Purity (%)

    95%
  • TSCA

    Yes
  • Boiling Point (˚C/mmHg)

    95-6° / 2
  • Melting Point (˚C)

    47-9°

Additional Properties

  • Hydrolytic Sensitivity

    8: reacts rapidly with moisture, water, protic solvents

    • Application

    Employed as a silylation reagent for photolithography substrates.1

    Reference

    1. Wilharm, P. et al. US Patent 5,162,559, 1992.

    Safety

  • Packaging Under

    Nitrogen