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CHLOROTRIS(TRIMETHYLSILYL)SILANE, 95%
Boiling Point: 95-6° / 2
Melting Point: 47-9°
Molecular Weight: 283.11
HMIS Key: 3-3-1-X
Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
Formula: C9H27ClSi4
Purity: 95%
Application: Employed as a silylation reagent for photolithography substrates.1
Reference: 1. Wilharm, P. et al. US Patent 5,162,559, 1992.
Silanes
Gases