CHLOROTRIS(TRIMETHYLSILYL)SILANE, 95%

Product Code: SIC2420.0
CAS No: 5565-32-2
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5565-32-2
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Pack Size
Quantity
Price
 
2.5 g
$183.00

Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • HMIS

    3-3-1-X
  • Molecular Formula

    C9H27ClSi4
  • Molecular Weight (g/mol)

    283.11
  • Purity (%)

    95%
  • TSCA

    Yes
  • Boiling Point (˚C/mmHg)

    95-96/2
  • Melting Point (˚C)

    47-9°

Additional Properties

  • Hydrolytic Sensitivity

    8: reacts rapidly with moisture, water, protic solvents

    • Application

    Employed as a silylation reagent for photolithography substrates.1

    Reference

    1. Wilharm, P. et al. US Patent 5,162,559, 1992.

    Safety

  • Packaging Under

    Nitrogen