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2-CHLOROETHYLSILANE
Boiling Point: 69-71°
Molecular Weight: 94.61
Specific Gravity: 0.904
HMIS Key: 3-4-1-X
Hydrolytic Sensitivity: 3: reacts with aqueous base
Formula: C2H7ClSi
Refractive Index: 1.4232
Application: Intermediate for H3SiCl; employed in CVD of SiN.1
Reference: 1. Arkles, B. et al. U.S. Patent 5,968,611, 1999.
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