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Product Code: SIC2268.5

Cas No: 18165-19-0

R&D quantities:

10 g

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Boiling Point: 69-71°

Molecular Weight: 94.61

Specific Gravity: 0.904

HMIS Key: 3-4-1-X

Hydrolytic Sensitivity: 3: reacts with aqueous base

Formula: C2H7ClSi

Refractive Index: 1.4232

Application: Intermediate for H3SiCl; employed in CVD of SiN.1

Reference: 1. Arkles, B. et al. U.S. Patent 5,968,611, 1999.