19824-59-0

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TANTALUM PENTAKIS(DIMETHYLAMIDE)

Product Code: OMTA075

Cas No: 19824-59-0

R&D quantities:

25 g
$1,040.00
5 g
$261.00

Boiling Point: 100° / 0.01 sub

Melting Point: >150° dec

Molecular Weight: 401.33

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: C10H30N5Ta

Application: Forms Ta3N5 films by CVD.1
In combination with O2, H2O forms Ta2O5 by CVD.2

Reference: 1. Fix, R. et al. Chem. Mater. 1993, 5, 614.
2. Son, K. et al. J. Vac. Sci. Technol., A 1998, 16, 1670.