19824-55-6

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HAFNIUM DIETHYLAMIDE

Product Code: OMHF075

Cas No: 19824-55-6

R&D quantities:

5gm
$224.00

Boiling Point: 130-5° / 0.1

Molecular Weight: 467.01

Alternative Name: TETRAKIS(DIETHYLAMINO) HAFNIUM

Specific Gravity: 1.249

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: C16H40HfN4

Application: Employed in ALD of hafnium nitride.1
Employed in CVD of HfO2.2

Reference: 1. Becker, J. et al. Chem. Mater. 2004, 16, 3497.
2. Oshita, Y. et al. Thin Solid Films, 2002, 406, 215.

Additional Properties: Color: yellow
Vapor pressure, 80°: 0.13 mm