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DIETHYLGALLIUM CHLORIDE
Boiling Point: 60-2° / 2
EINECS Number: 250-387-7
Molecular Weight: 163.29
Specific Gravity: 1.35
HMIS Key: 3-4-2-X
Hydrolytic Sensitivity: 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required
Formula: C4H10ClGa
Application: In combination with AsH3 used in ALE of GaAs.1
Reference: 1. Narman, A. et al. Surf. Sci. 1992, 269-270, 1041.
Silanes
Silanes