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(THIOPHENOXYPHENYL)DIPHENYLSULFONIUM HEXAFLUOROANTIMONATE-BIS(BIS(DIPHENYLSULFONIUM)DIPHENYLTHIO)ETHER HEXAFLUOROANTIMONATE BLEND, 50% in propylene carbonate
- HMIS 3-1-1-X
- Molecular Formula C24H19F6S2Sb
- Molecular Weight (g/mol) 607.28/1028.28
- TSCA Yes
- Boiling Point (˚C/mmHg) NA
- Density (g/mL) 1.40
- Density Temperature (˚C) 25
- Flash Point (˚C) 145
UV sensitizer for poly(t-butoxycarbonyloxystyrene) chemically amplified photoresist.1
1. Hinsberg, W. et al. J. Vac. Sci. Technol., B 1998, 16, 3689.