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EINECS Number: 240-866-9
Alternative Name: TMAA
HMIS Key: 4-4-2-X
Hydrolytic Sensitivity: 10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required
Application: Employed in CVD of aluminum.1
Employed in chemical beam epitaxy of aluminum nitride.2
Reference: 1. Foord, J. et al. J. Chem. Soc., Chem. Comm. 1990, 11.
2. Glass, J. et al. J. Phys. Chem. Solids 1996, 57, 563.