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ALANE-DIMETHYLETHYLAMINE COMPLEX
Alternative Name: DMEAA
Specific Gravity: 0.78
HMIS Key: 4-4-2-X
Hydrolytic Sensitivity: 10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required
Formula: C4H14AlN
TSCA: TSCA
Application: Employed in CVD of aluminum.1,2
Reference: 1. Jang, T. et al. Thin Solid Films 1998, 333, 137.
2. Neo, Y. et al. Appl. Surf. Sci. 1999, 142, 443.
Metal-Organics
Organosilicon & Metal-organic Precursors for Microelectronics & Optoelectronics