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- Einecs Number 237-880-2
- HMIS 2-0-0-X
- Molecular Formula C6O6W
- Molecular Weight (g/mol) 351.92
- TSCA Yes
- Density (g/mL) 2.671
- Melting Point (˚C) 169-70° dec
Employed in MOCVD of tungsten1 and tungsten nitride2 in ULSI devices.
1. Faltermeier, F. et al. In Advanced Metallization for ULSI Applications, 1992 Cale, T. et al. Eds. Mater. Res. Soc. 1993.
2. Kelsey, J. et al. J. Vac. Sci. Technol. 1999, B17, 1101.