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Product Code: INTU030

Cas No: 14040-11-0

50 g
2 kg
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EINECS Number: 237-880-2

Specific Gravity: 2.671

HMIS Key: 2-0-0-X

Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions

Formula: C6O6W


Application: Employed in MOCVD of tungsten1 and tungsten nitride2 in ULSI devices.

Reference: 1. Faltermeier, F. et al. In Advanced Metallization for ULSI Applications, 1992 Cale, T. et al. Eds. Mater. Res. Soc. 1993.
2. Kelsey, J. et al. J. Vac. Sci. Technol. 1999, B17, 1101.

Additional Properties: ?Hform: -227 kcal/mole
?Hsub: 17.2 kcal/mole