To search by structure, left click in the box below to display the chemdraw toolbar. Then, draw the chemical structure of interest in the box using the toolbar. When your structure is complete, click “Search by Name” or “Search by SMILES” to generate the product name or SMILES respectively. This feature will search within the Gelest product database for matching chemical names or SMILES. Note: In cases where Gelest uses alternate chemical names, it may be necessary to search for the product of interest by its CAS#.
All structures are computer generated. Please rely on the product data below for placing your order. If you see any errors in structures, please email customer service so that they can be addressed.
TUNGSTEN HEXACARBONYL
EINECS Number: 237-880-2
Melting Point: 169-70° dec
Molecular Weight: 351.92
Specific Gravity: 2.671
HMIS Key: 2-0-0-X
Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions
Formula: C6O6W
TSCA: TSCA
Application: Employed in MOCVD of tungsten1 and tungsten nitride2 in ULSI devices.
Reference: 1. Faltermeier, F. et al. In Advanced Metallization for ULSI Applications, 1992 Cale, T. et al. Eds. Mater. Res. Soc. 1993.
2. Kelsey, J. et al. J. Vac. Sci. Technol. 1999, B17, 1101.
Additional Properties: ?Hform: -227 kcal/mole?Hsub: 17.2 kcal/moleVapor pressure, 67°: 1.2 torr
Metal-Organics
Metal-Organics