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TUNGSTEN HEXACARBONYL
EINECS Number: 237-880-2
Specific Gravity: 2.671
HMIS Key: 2-0-0-X
Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions
Formula: C6O6W
TSCA: TSCA
Application: Employed in MOCVD of tungsten1 and tungsten nitride2 in ULSI devices.
Reference: 1. Faltermeier, F. et al. In Advanced Metallization for ULSI Applications, 1992 Cale, T. et al. Eds. Mater. Res. Soc. 1993.
2. Kelsey, J. et al. J. Vac. Sci. Technol. 1999, B17, 1101.
Additional Properties: ?Hform: -227 kcal/mole?Hsub: 17.2 kcal/mole
Metal-Organics
Metal-Organics