TUNGSTEN HEXACARBONYL

Product Code: INTU030
CAS No: 14040-11-0
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
50 g
$356.00
2 kg
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Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    237-880-2
  • HMIS

    2-0-0-X
  • Molecular Formula

    C6O6W
  • Molecular Weight (g/mol)

    351.92
  • TSCA

    Yes
  • Density (g/mL)

    2.671
  • Melting Point (˚C)

    169-70° dec

Additional Properties

  • Hydrolytic Sensitivity

    4: no reaction with water under neutral conditions
  • Application

    Employed in MOCVD of tungsten1 and tungsten nitride2 in ULSI devices.

    Reference

    1. Faltermeier, F. et al. In Advanced Metallization for ULSI Applications, 1992 Cale, T. et al. Eds. Mater. Res. Soc. 1993.
    2. Kelsey, J. et al. J. Vac. Sci. Technol. 1999, B17, 1101.

    Safety

  • Hazard Info

    oral rat, LD50: >5,000 mg/kg
  • Packaging Under

    Nitrogen