7720-83-4

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TITANIUM TETRAIODIDE (99.99% on metals basis)

Product Code: INTI071

Cas No: 7720-83-4

R&D quantities:

50 g
$351.00

Boiling Point: 377°

EINECS Number: 231-754-0

Melting Point: 150-1°

Molecular Weight: 555.52

Specific Gravity: 4.3

HMIS Key: 3-2-1-X

Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents

Formula: I4Ti

TSCA: TSCA

Application: Employed in CVD of Ti and TiN films for microelectronics.1,2
In combination with SiI4 forms Ti-Si-N diffusion barriers.3

Reference: 1. Faltermeier, C. et al. J. Electrochem. Soc. 1997, 144, 1002.
2. Kaloyeros, A. et al. U.S. Patent 6,090,709, 2000.
3. Eisenbraun, E. et al. J. Vac. Sci. Technol., B 2000, 18(4), 2011.

Additional Properties: ?Hform: -89.8 kcal/mole
?Hsub: 23.4 kcal/mole
Undergoes thermal transition at 126-9°
Contains ~ 3% free Iodine
Cocatalyst with Al(iBu)3 for high cis-butadiene polymers
Vapor pressure, 275°: 100 mm