TITANIUM TETRAIODIDE, 99.99% on metals basis

Product Code: INTI071
CAS No: 7720-83-4
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
50 g
$351.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    231-754-0
  • HMIS

    3-2-1-X
  • Molecular Formula

    I4Ti
  • Molecular Weight (g/mol)

    555.52
  • TSCA

    Yes
  • Boiling Point (˚C/mmHg)

    377
  • Density (g/mL)

    4.3
  • Melting Point (˚C)

    150-1°

Additional Properties

  • Hydrolytic Sensitivity

    8: reacts rapidly with moisture, water, protic solvents
  • Application

    Employed in CVD of Ti and TiN films for microelectronics.1,2
    In combination with SiI4 forms Ti-Si-N diffusion barriers.3

    Reference

    1. Faltermeier, C. et al. J. Electrochem. Soc. 1997, 144, 1002.
    2. Kaloyeros, A. et al. U.S. Patent 6,090,709, 2000.
    3. Eisenbraun, E. et al. J. Vac. Sci. Technol., B 2000, 18(4), 2011.

    Safety

  • Packaging Under

    Nitrogen