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Product Code: INTA075

Cas No: 7783-71-3

R&D quantities:

25 g

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Boiling Point: 229-230°

EINECS Number: 232-022-3

Melting Point: 96-7°

Molecular Weight: 275.94

Specific Gravity: 4.74

HMIS Key: 3-0-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: F5Ta


Application: Employed in CVD of TaN for diffusion barriers in microelectronics.1

Reference: 1. Kaloyeros, A. et al. U.S. Patent 6,139,922, 2000.

Additional Properties: Soluble: hot CCl4
?Hvap: 11.0 kcal/mole