TANTALUM PENTABROMIDE

Product Code: INTA070
CAS No: 13451-11-1
SDS Sheets: EU | US
Pack Size
Quantity
Price
 
25 g
$246.00

Product data and descriptions listed are typical values, not intended to be used as specification.

  • HMIS

    3-0-1-X
  • Molecular Formula

    Br5Ta
  • Molecular Weight (g/mol)

    580.49
  • TSCA

    Yes
  • Delta H Vaporization (kJ/mol)

    14.9 kcal/mole
  • Boiling Point (˚C/mmHg)

    348-9°
  • Density (g/mL)

    4.67
  • Melting Point (˚C)

    265°

Additional Properties

  • Hydrolytic Sensitivity

    7: reacts slowly with moisture/water
  • Application

    Precursor for Ta and TaN by CVD.1,2

    Reference

    1. Chen, X. et al. J. Vac. Sci. Technol., B 1998, 16, 2887.
    2. Arkles, B. et al. U.S. Patent 5,919,531, 1999.

    Safety

  • Packaging Under

    Nitrogen