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EINECS Number: 235-064-0
Melting Point: 500° dec
Molecular Weight: 273.80
Specific Gravity: 5.35
HMIS Key: 2-0-0-X
Hydrolytic Sensitivity: TSCA
Application: Employed as a dielectric in gallium arsenide MISFETS.1,2
Reference: 1. Pande, K. et al. Appl. Phys. 1982, A28, 123.
2. Pande, K. et al. Solid State Elec. 1981, 25(2), 145.
Additional Properties: ?Hcomb: -369.0 kcal/mole?Hform: -15.6 kcal/mole