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ZIRCONIUM 1,1,1-TRIFLUORO-2,4-PENTANEDIONATE
HMIS Key: 3-2-0-X
Formula: C20H16F12O8Zr
Application: Employed in MOCVD of zirconia films.1
Reference: 1. Desu, S. et al. In Chemical Vapor Deposition of Refractory Metals Besman, T. et al. Eds.; MRS Proc. 1990, 168, 349.
Additional Properties: Methanol, Acetone, THF
Metal-Organics
Metal-Organics