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Product Code: AKZ985

Cas No: 17499-68-2

R&D quantities:

10 g
2.5 g

Boiling Point: 115° / 0.05 sub

Melting Point: 125-9°

Molecular Weight: 703.54

HMIS Key: 3-2-0-X

Formula: C20H16F12O8Zr

Application: Employed in MOCVD of zirconia films.1

Reference: 1. Desu, S. et al. In Chemical Vapor Deposition of Refractory Metals Besman, T. et al. Eds.; MRS Proc. 1990, 168, 349.

Additional Properties: Soluble: methanol, acetone, THF
Vapor pressure, 170°: 4 mm