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PALLADIUM HEXAFLUORO-2,4-PENTANEDIONATE
Boiling Point: 70° / 70 sub
EINECS Number: 265-271-1
Melting Point: 100°
Molecular Weight: 520.51
Specific Gravity: 2.404
HMIS Key: 3-1-0-X
Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions
Formula: C10H2F12O4Pd
Application: Forms Pd and Pd/Cu films by MOCVD.1,2
Reference: 1. Lin, W. et al. J. Am. Chem. Soc. 1993, 115, 11644; 1996, 118, 5477.
2. Bhaskaran, V. et al. Mater. Res. Soc. Symp. 1996, 427, 231.
Additional Properties: ?Hfus: 10.2 cal/gSoluble: hexane, methylene chloride, methanol, toluene, acetone, ethylacetateStandard for electron capture GC analysis
Silanes
Metal-Organics