309915-48-8

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HAFNIUM 2-METHOXYMETHYL-2-PROPOXIDE

Product Code: AKH333

Cas No: 309915-48-8

R&D quantities:

5 g
$169.00

Boiling Point: 135° / 0.1

Melting Point: -5°

Molecular Weight: 591.05

Alternative Name: HAFNIUM MMP (MMP = METHOXY-t-BUTOXIDE)

Specific Gravity: 1.303

Flashpoint: 67°C (153°F)

HMIS Key: 2-3-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C20H44HfO8

Refractive Index: 1.4570

Application: Employed in CVD of HfO2.1
Used in atomic layer deposition (ALD) of hafnium oxide layers.2

Reference: 1. Williams, P. et al. J. Mater. Chem. 2002, 12, 165.
2. Kukli, K. et al. Chem. Mater. 2003, 15, 1722.