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Boiling Point: 90° / 5
Molecular Weight: 470.95
Specific Gravity: 1.166
HMIS Key: 2-2-1-X
Hydrolytic Sensitivity: 7: reacts slowly with moisture/water
Refractive Index: 1.4240
Application: Employed in CVD of HfO2 gates.1
Reference: 1. Choi, K. et al. J. Mater. Res. 2003, 18, 60.
Additional Properties: ?Hvap: 16.3 kcal/moleVapor pressure, 67°: 1.5 mmVapor pressure, 125°: 30 mm