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Product Code: AKH326

Cas No: 2172-02-3

5 g

Specific Gravity: 1.166

HMIS Key: 2-2-1-X

Hydrolytic Sensitivity: 7: reacts slowly with moisture/water

Formula: C16H36HfO4

Refractive Index: 1.4240

Application: Employed in CVD of HfO2 gates.1

Reference: 1. Choi, K. et al. J. Mater. Res. 2003, 18, 60.

Additional Properties: ?Hvap: 16.3 kcal/mole
Vapor pressure, 125°: 30 mm