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- HMIS 2-2-1-X
- Molecular Formula C16H36HfO4
- Molecular Weight (g/mol) 470.95
- TSCA No
- Delta H Vaporization (kJ/mol) 16.3 kcal/mole
- Boiling Point (˚C/mmHg) 90° / 5
- Density (g/mL) 1.166
- Refractive Index @ 20˚C 1.4240
Employed in CVD of HfO2 gates.1
1. Choi, K. et al. J. Mater. Res. 2003, 18, 60.