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ERBIUM HEXAFLUORO-2,4-PENTANEDIONATE
HMIS Key: 3-1-0-X
Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions
Formula: C15H3ErF18O6
Application: Used to prepare Er doped silicon by CVD in combination with SiH4 at 650° at 0.001 mm.1
Reference: 1. Beach, D. et al. Mater. Res. Soc. Proc. 1993, 282, 397; Eur. Patent Application 480110, 1993.
Metal-Organics
Metal-Organics