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Boiling Point: 170° dec
Melting Point: 70-73°
Molecular Weight: 648.17
Alternative Name: ALUMINUM HFAC
Specific Gravity: 1.859
HMIS Key: 3-1-0-X
Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions
Application: Generates aluminum oxide films from gas phase at 350-450°.1
Reference: 1. Temple, D. et al. J. Electron. Mater. 1990, 19, 995.
Additional Properties: Soluble: carbon tetrachloride, tolueneUV max: 307 nm?Hvap: 14.3 kcal/moleVapor pressure, 50°: 0.4 mmVapor pressure, 75°: 10 mm