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Product Code: AKA063

Cas No: 15306-18-0

25 g
5 g

Product data and descriptions listed are typical values, not intended to be used as specification.

Alternative Name: ALUMINUM HFAC

Specific Gravity: 1.859

HMIS Key: 3-1-0-X

Hydrolytic Sensitivity: 4: no reaction with water under neutral conditions

Formula: C15H3AlF18O6

Application: Generates aluminum oxide films from gas phase at 350-450°.1

Reference: 1. Temple, D. et al. J. Electron. Mater. 1990, 19, 995.

Additional Properties: Soluble: carbon tetrachloride, toluene
?Hvap: 14.3 kcal/mole
Carbon TetraChloride, Toluene
Vapor pressure, 75°: 10 mm