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Product Code: SII6463.4

Cas No: 13597-87-0

Boiling Point: 101°

Melting Point: -99°

Molecular Weight: 122.42

Alternative Name: (TRISILYL)SLANE

Specific Gravity: 0.793

HMIS Key: 3-4-3-X

Formula: H10Si4

Refractive Index: 1.5449


Application: Precursor for low temp. epitaxy of doped crystalline silicon.1,2
Employed in low temperature CVD of amorphous silicon.2

Reference: 1. Francis, T. et al. US Pat. Appl. 20120003819, 2012.
2. Kanoh, H. et al. Jpn. J. Appl. Phys. 1993, 32, 2613.

Additional Properties: ?Hvap: 32.5 kJ/mole
Vapor pressure, 15°: 21 mm