Sublimation-Entrainer

Sublimation-Entrainers provide delivery sources for high-vapor pressure solids utilized in ALD and CVD applications.  The reservoir portion can be filled to level with solids.  The domed head has a directed inlet for carrier gas and a side exit for delivery.  The reservoir can be heated to moderate temperatures (150°C) to increase vapor pressure of solids and allow entrainment by carrier gases.  An extra port is provided for evacuation or thermocouple access.  Sublimation-entrainers are fabricated from 316L stainless steel and equipped with high vacuum fittings.  Valve connections are SS-4-VCR-3.  Auxilliary port is SS-8-VCR-1-8.